Product
Matching Network
Matching Network (10kW)
Click on the attachment to download.
4000+ Sales in the plasma market
- Adopted broadband detector
- Stepping motor, No gear (improved durability, accurate capacitor control)
- Simple user interface (RS-232, GUI Software)
- Maintenance cost reduction
- Frequency range from 400kHz to 27.12 MHz
- Output range from 300W to 30kW
- Customized for clients
- Adopted broadband detector
- Stepping motor, No gear (improved durability, accurate capacitor control)
- Simple user interface (RS-232, GUI Software)
- Maintenance cost reduction
- Frequency range from 400kHz to 27.12 MHz
- Output range from 300W to 30kW
- Customized for clients
| Product Specification 1 | Specifications -iMat13175L-C1134-S.pdf |
|---|
Click on the attachment to download.
Digital Automatic Matching Device
- Step Motor System
- Self-diagnosis for capacitor position and error correction
- Self-diagnosis for capacitor position and error correction
User-Centric Software
- LogicMAT Console program
- Preset mode optimized for all processes
- Provides individual settings and position values for load/tune capacitors
- Preset mode optimized for all processes
- Provides individual settings and position values for load/tune capacitors
Simple Design
- Customizable upon customer request
- Durable and intuitive design
- Equipped with a honeycomb-structured filter for EMI shielding
- Modular design makes maintenance and management easy
- Durable and intuitive design
- Equipped with a honeycomb-structured filter for EMI shielding
- Modular design makes maintenance and management easy
Product Range
- Wide range of frequency matching from low to high frequencies
- Various models available from 600W to 30kW
- Customizable to customer specifications
- Offers a hybrid matching box capable of simultaneous RF and DC operation.
- Various models available from 600W to 30kW
- Customizable to customer specifications
- Offers a hybrid matching box capable of simultaneous RF and DC operation.
